Abstract. This paper analyses the features, types and principles of construction of miniature gyroscopes and accelerometers, as one of the main types of sensors of inertial measuring systems. An analysis is also being made of the possibilities and prospects for integrating magnetometers and GPS modules into inertial computing systems, which significantly improvers the performance of the measuring system. The physical principles and mathematical models of MEMS accelerometers, gyroscopes, magnetometers and their integrated modules are presented, which make it possible to build miniature magnetic heading and attitude meters for aircraft with high accuracy. A typical MEMS model with an accelerometer and a gyroscope is considered, a mathematical model and a MatLab/Simulink model of such a MEMS sensor system are given, which makes it possible to build a real model of system for measuring the attitude and course of aircraft.

Keywords: MEMS sensors, accelerometers, gyroscopes, magnetometers, inertial computing systems, mathematical model, attitude, Simulink model.